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TURBOVAC 90i, 40 KF

Turbovac 90i, 40 KF
SKU -810011V1000
Turbomolecular Pumps with Hybrid Rotor Suspension with integrated Frequency Converter

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This product is currently out of stock and unavailable.

Product Description

Turbovac iX – SKU -810011V1000 -Turbovac 90i, 40 KF

Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.


Properties

  • Pumping speed up to 1.450 l/s
  • Oil-free hybrid bearings (mechanical/permanent magnetic)
  • Installation in any orientation
  • Integrated electronics, including a variety of options for communication and control of accessory components
  • TURBO.CONTROL i display unit (optionally as rack version or benchtop unit) to control and monitor the pump, including connection facility for two pressure gauges available as an accessory.
Technical Data Turbovac 90i, 40 KF Turbovac 90i, 63 ISO-K Turbovac 90i, 63 CF
High-vacuum connection 40 KF 63 ISO-K 63 CF
Forevacuum connection 16 KF 16 KF 16 KF
Units DN DN DN
Pumping speed N2 38 l/s 90 l/s 90 l/s
Ar 36 l/s 83 l/s 83 l/s
He 39 l/s 90 l/s 90 l/s
H2 31 l/s 78 l/s 78 l/s
Gas throughput N2 10 mbar*l/s 10 mbar*l/s 10 mbar*l/s
Ar 3 mbar*l/s 3 mbar*l/s 3 mbar*l/s
He 11 mbar*l/s 11 mbar*l/s 11 mbar*l/s
H2 11 mbar*l/s 11 mbar*l/s 11 mbar*l/s
Compression ratio N2 1×1011 1×1011 1×1011
Ar 1×1011 1×1011 1×1011
He
H2 5×107 5×107 5×107
Ultimate Pressure <8x10-8 mbar <8x10-8 mbar <5x10-10 mbar
Max. permissable forevacuum pressure for N2 14 mbar 14 mbar 14 mbar
Operating speed 72000 min-1 72000 min-1 72000 min-1
Run-up time, approx. 1.5 minutes 1.5 minutes 1.5 minutes
Max. power consumption 240 W 240 W 240 W
Power consumption at ultimate pressure 7 W 7 W 7 W
Cooling standard Convection Convection Convection
Cooling optional Air or water Air or water Air or water
Maximum bake-out temperature of the CF version, water cooled 100 °C 100 °C 100 °C
Purge Gas connection G 1/8″ G 1/8″ G 1/8″
Venting Connection G 1/8″ G 1/8″ G 1/8″

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Additional Information

Weight N/A
SKU

810011V1000, 810031V1000, 810041V1000

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