Product Description

Turbovac iX – SKU -810031V3300 -Turbovac 90 iX, 63 ISO-K

Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.

Properties

Pumping speed up to 1.450 l/s
Oil-free hybrid bearings (mechanical/permanent magnetic)
Installation in any orientation
Integrated electronics, including a variety of options for communication and control of accessory components
TURBO.CONTROL i display unit (optionally as rack version or benchtop unit) to control and monitor the pump, including connection facility for two pressure gauges available as an accessory.

Technical Data	Turbovac 90 iX, 63 ISO-K	Turbovac 90 iX, 63 CF
High-vacuum connection	63 ISO-K	63 CF
Forevacuum connection	16 KF	16 KF
Units	DN	DN
Pumping speed N₂	90 l/s	90 l/s
Ar	83 l/s	83 l/s
He	90 l/s	90 l/s
H₂	78 l/s	78 l/s
Gas throughput N₂	10 mbar*l/s	10 mbar*l/s
Ar	3 mbar*l/s	3 mbar*l/s
He	11 mbar*l/s	11 mbar*l/s
H₂	11 mbar*l/s	11 mbar*l/s
Compression ratio N₂	1×10¹¹	1×10¹¹
Ar	1×10¹¹	1×10¹¹
He
H₂	5×10⁷	5×10⁷
Ultimate Pressure	<8x10^-8 mbar	<5x10^-10 mbar
Max. permissable forevacuum pressure for N₂	14 mbar	14 mbar
Operating speed	72000 min-1	72000 min-1
Run-up time, approx.	1.5 minutes	1.5 minutes
Max. power consumption	240 W	240 W
Power consumption at ultimate pressure	7 W	7 W
Cooling standard	Convection	Convection
Cooling optional	Air or water	Air or water
Maximum bake-out temperature of the CF version, water cooled	100 °C	100 °C
Purge Gas connection	G 1/8″	G 1/8″
Venting Connection	G 1/8″	G 1/8″

Additional Information

Weight	N/A
SKU	810041V1000, 810031V3300
Inlet Connection	63 CF, 63 ISO-K

TURBOVAC 90 iX, 63 ISO-K

Product Description

Additional Information

Exim Engineering Inc. Authorized Distributor & Supplier of Leybold Industrial Vacuum Pumps in Southern California | Leybold Exim

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