Product Description
Turbovac i/iX – SKU -840071V1000-Turbovac 850i, 160 ISO-K
Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.
Technical Features
- Integrated electronic drive unit with 24/48 V DC supply.
- Best-in-class pumping speed and compression ratio, especially for light gases.
- Vacuum port design flexibility
- Installation in any orientation
- Superior reliability due to innovative pump and bearing design
- Maintenance-free hybrid mechanical TMP
- There is no need for oil changes.
- On-site maintenance possibility (bearing exchange) to reduce service costs and time.
- The most comprehensive range of interface options (USB, RS 485 and 15-pin digital I/O as standard)
- Optimized size/performance ratio on 63, 100, 160 and 200 flanges
- Flexible accessory program options for easy plug & play.
- Flexibility to match different processes and application requirements.
- An integrated vacuum system controller with flexible interfaces and several accessory ports controls cooling units, valves, gauges, vacuum pumps, etc.