SKU N/A Category

TURBOVAC 450 iX

Turbovac 450 iX, 160 ISO-K
SKU -830071V3300
Turbomolecular Pumps with Hybrid Rotor Suspension with integrated Frequency Converter and integrated Vacuum System Controller

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Product Description

Turbovac i/iX – SKU -830071V1000-Turbovac 450i, 160 ISO-K

Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.


Technical Features

  • Integrated electronic drive unit with 24/48 V DC supply.
  • Best-in-class pumping speed and compression ratio, especially for light gases.
  • Vacuum port design flexibility
  • Installation in any orientation
  • Superior reliability due to innovative pump and bearing design
  • Maintenance-free hybrid mechanical TMP
  •  There is no need for oil changes.
  • On-site maintenance possibility (bearing exchange) to reduce service costs and time.
  • The most comprehensive range of interface options (USB, RS 485 and 15-pin digital I/O as standard)
  • Optimized size/performance ratio on 63, 100, 160 and 200 flanges
  • Flexible accessory program options for easy plug & play.
  • Flexibility to match different processes and application requirements.
  • Integrated vacuum system controller with flexible interfaces and several accessory ports for controlling cooling units, valves, gauges, vacuum pumps, etc.
Technical DataTurbovac 450 iX, 160 ISO-KTurbovac 450 iX, 160 CF
High-vacuum connection160 ISO-K160 CF
Forevacuum connection25 KF25 KF
UnitsDNDN
Pumping speed N2430 l/s430 l/s
Ar400 l/s400 l/s
He440 l/s440 l/s
H2420 l/s420 l/s
Gas throughput N24.5 mbar*l/s4.5 mbar*l/s
Ar2 mbar*l/s2 mbar*l/s
He8 mbar*l/s8 mbar*l/s
H28 mbar*l/s8 mbar*l/s
Compression ratio N21×10111×1011
Ar1×10111×1011
He1×1081×108
H21×1061×106
Ultimate Pressure<8x10-8 mbar<5x10-10 mbar
Max. permissable forevacuum pressure for N210 mbar10 mbar
Operating speed60000 min-160000 min-1
Run-up time, approx.5.5 minutes5.5 minutes
Max. power consumption240 W240 W
Power consumption at ultimate pressure20 W20 W
Cooling standardConvectionConvection
Cooling optionalAir or waterAir or water
Maximum bake-out temperature of the CF version, water cooled100 °C100 °C
Purge Gas connectionG 1/8″G 1/8″
Venting ConnectionG 1/8″G 1/8″

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Additional Information

WeightN/A
SKU

830071V3300, 830081V3300

Inlet Connection

160 ISO-K, 160 CF

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