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SKU N/A Category

TURBOVAC 350 iX

Turbovac 350 iX, 100 ISO-K
SKU -830051V3300
Turbomolecular Pumps with Hybrid Rotor Suspension with integrated Frequency Converter and integrated Vacuum System Controller

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Product Description

Turbovac i/iX – SKU -830051V3300-Turbovac 350 iX, 100 ISO-K

Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.


Technical Features

  • Integrated electronic drive unit with 24/48 V DC supply.
  • Best-in-class pumping speed and compression ratio, especially for light gases.
  • Vacuum port design flexibility
  • Installation in any orientation
  • Superior reliability due to innovative pump and bearing design
  • Maintenance-free hybrid mechanical TMP
  •  There is no need for oil changes.
  • On-site maintenance possibility (bearing exchange) to reduce service costs and time.
  • The most comprehensive range of interface options (USB, RS 485 and 15-pin digital I/O as standard)
  • Optimized size/performance ratio on 63, 100, 160 and 200 flanges
  • Flexible accessory program options for easy plug & play.
  • Flexibility to match different processes and application requirements.
  • Integrated vacuum system controller with flexible interfaces and several accessory ports for controlling cooling units, valves, gauges, vacuum pumps, etc.
Technical Data Turbovac 350i, 100 ISO-K Turbovac 350i, 100 CF
High-vacuum connection 100 ISO-K 100 CF
Forevacuum connection 25 KF 25 KF
Units DN DN
Pumping speed N2 290 l/s 290 l/s
Ar 260 l/s 260 l/s
He 360 l/s 360 l/s
H2 350 l/s 350 l/s
Gas throughput N2 4.5 mbar*l/s 4.5 mbar*l/s
Ar 2 mbar*l/s 2 mbar*l/s
He 8 mbar*l/s 8 mbar*l/s
H2 8 mbar*l/s 8 mbar*l/s
Compression ratio N2 1×1011 1×1011
Ar 1×1011 1×1011
He 1×108 1×108
H2 1×106 1×106
Ultimate Pressure <8x10-8 mbar <5x10-10 mbar
Max. permissable forevacuum pressure for N2 10 mbar 10 mbar
Operating speed 60000 min-1 60000 min-1
Run-up time, approx. 5.5 minutes 5.5 minutes
Max. power consumption 240 W 240 W
Power consumption at ultimate pressure 20 W 20 W
Cooling standard Convection Convection
Cooling optional Air or water Air or water
Maximum bake-out temperature of the CF version, water cooled 100 °C 100 °C
Purge Gas connection G 1/8″ G 1/8″
Venting Connection G 1/8″ G 1/8″

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Additional Information

Weight N/A
SKU

830051V3300, 830061V3300

Inlet Connection

100 ISO-K, 100 CF

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