Product Description

Turbovac i/iX – SKU -830051V3300-Turbovac 350 iX, 100 ISO-K

Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.

Technical Features

Integrated electronic drive unit with 24/48 V DC supply.
Best-in-class pumping speed and compression ratio, especially for light gases.
Vacuum port design flexibility
Installation in any orientation
Superior reliability due to innovative pump and bearing design
Maintenance-free hybrid mechanical TMP
There is no need for oil changes.
On-site maintenance possibility (bearing exchange) to reduce service costs and time.
The most comprehensive range of interface options (USB, RS 485 and 15-pin digital I/O as standard)
Optimized size/performance ratio on 63, 100, 160 and 200 flanges
Flexible accessory program options for easy plug & play.
Flexibility to match different processes and application requirements.
Integrated vacuum system controller with flexible interfaces and several accessory ports for controlling cooling units, valves, gauges, vacuum pumps, etc.

Technical Data	Turbovac 350i, 100 ISO-K	Turbovac 350i, 100 CF
High-vacuum connection	100 ISO-K	100 CF
Forevacuum connection	25 KF	25 KF
Units	DN	DN
Pumping speed N₂	290 l/s	290 l/s
Ar	260 l/s	260 l/s
He	360 l/s	360 l/s
H₂	350 l/s	350 l/s
Gas throughput N₂	4.5 mbar*l/s	4.5 mbar*l/s
Ar	2 mbar*l/s	2 mbar*l/s
He	8 mbar*l/s	8 mbar*l/s
H₂	8 mbar*l/s	8 mbar*l/s
Compression ratio N₂	1×10¹¹	1×10¹¹
Ar	1×10¹¹	1×10¹¹
He	1×10⁸	1×10⁸
H₂	1×10⁶	1×10⁶
Ultimate Pressure	<8x10^-8 mbar	<5x10^-10 mbar
Max. permissable forevacuum pressure for N₂	10 mbar	10 mbar
Operating speed	60000 min-1	60000 min-1
Run-up time, approx.	5.5 minutes	5.5 minutes
Max. power consumption	240 W	240 W
Power consumption at ultimate pressure	20 W	20 W
Cooling standard	Convection	Convection
Cooling optional	Air or water	Air or water
Maximum bake-out temperature of the CF version, water cooled	100 °C	100 °C
Purge Gas connection	G 1/8″	G 1/8″
Venting Connection	G 1/8″	G 1/8″

Additional Information

Weight	N/A
SKU	830051V3300, 830061V3300
Inlet Connection	100 ISO-K, 100 CF

TURBOVAC 350 iX

Product Description

Additional Information

Exim Engineering Inc. Authorized Distributor & Supplier of Leybold Industrial Vacuum Pumps in Southern California | Leybold Exim

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