SKU N/A Category

TURBOVAC 250i, 100 ISO-K

Turbovac 250i, 100 ISO-K
SKU –820051V1000
Turbomolecular Pumps with Hybrid Rotor Suspension with integrated Frequency Converter

In Stock

This product is currently out of stock and unavailable.

Product Description

Turbovac i/iX – SKU -820051V1000 -Turbovac 250i, 100 ISO-K

Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.

Technical Features

  • Integrated electronic drive unit with 24/48 V DC supply.
  • Best-in-class pumping speed and compression ratio, especially for light gases.
  • Vacuum port design flexibility
  • Installation in any orientation
  • Superior reliability due to innovative pump and bearing design
  • Maintenance-free hybrid mechanical TMP
  •  There is no need for oil changes.
  • On-site maintenance possibility (bearing exchange) to reduce service costs and time.
  • The most comprehensive range of interface options (USB, RS 485 and 15-pin digital I/O as standard)
  • Optimized size/performance ratio on 63, 100, 160 and 200 flanges
  • Flexible accessory program options for easy plug & play.
  • Flexibility to match different process and application requirements
Technical Data Turbovac 250i, 100 ISO-K Turbovac 250i, 100 CF
High-vacuum connection 100 ISO-K 100 CF
Forevacuum connection 16 KF 16 KF
Units DN DN
Pumping speed N2 225 l/s 225 l/s
Ar 210 l/s 210 l/s
He 250 l/s 250 l/s
H2 210 l/s 210 l/s
Gas throughput N2 6 mbar*l/s 6 mbar*l/s
Ar 3 mbar*l/s 3 mbar*l/s
He 6 mbar*l/s 6 mbar*l/s
H2 10 mbar*l/s 10 mbar*l/s
Compression ratio N2 1×1011 1×1011
Ar 1×1011 1×1011
H2 2×107 2×107
Ultimate Pressure <8x10-8 mbar <5x10-10 mbar
Max. permissable forevacuum pressure for N2 14 mbar 14 mbar
Operating speed 72000 min-1 72000 min-1
Run-up time, approx. 2 minutes 2 minutes
Max. power consumption 240 W 240 W
Power consumption at ultimate pressure 7 W 7 W
Cooling standard Convection Convection
Cooling optional Air or water Air or water
Maximum bake-out temperature of the CF version, water cooled 100 °C 100 °C
Purge Gas connection G 1/8″ G 1/8″
Venting Connection G 1/8″ G 1/8″

View Brochure

Additional Information

Weight N/A

820051V1000, 820061V1000

Inlet Connection

100 ISO-K, 100 CF

Skip to content