SKU N/A Category

TURBOVAC 250 iX

Turbovac 250 iX, 100 ISO-K
SKU -820051V3300
Turbomolecular Pumps with Hybrid Rotor Suspension with integrated Frequency Converter and integrated Vacuum System Controller

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Product Description

Turbovac i/iX – SKU -820051V3300 -Turbovac 250 iX, 100 ISO-K

Turbomolecular vacuum pumps (TURBOVAC) are utilized in applications that demand a clean high or ultrahigh vacuum, such as research, development, and industry like semiconductors, analytical instrumentation, and coating technology.


Technical Features

  • Integrated electronic drive unit with 24/48 V DC supply.
  • Best-in-class pumping speed and compression ratio, especially for light gases.
  • Vacuum port design flexibility
  • Installation in any orientation
  • Superior reliability due to innovative pump and bearing design
  • Maintenance-free hybrid mechanical TMP
  • There is no need for oil changes.
  • On-site maintenance possibility (bearing exchange) to reduce service costs and time.
  • The most comprehensive range of interface options (USB, RS 485 and 15-pin digital I/O as standard)
  • Optimized size/performance ratio on 63, 100, 160 and 200 flanges
  • Flexible accessory program options for easy plug & play.
  • Flexibility to match different processes and application requirements.
  • An integrated vacuum system controller with flexible interfaces and several accessory ports controls cooling units, valves, gauges, vacuum pumps, etc.
Technical DataTurbovac 250i, 100 ISO-KTurbovac 250i, 100 CF
High-vacuum connection100 ISO-K100 CF
Forevacuum connection16 KF16 KF
UnitsDNDN
Pumping speed N2225 l/s225 l/s
Ar210 l/s210 l/s
He250 l/s250 l/s
H2210 l/s210 l/s
Gas throughput N26 mbar*l/s6 mbar*l/s
Ar3 mbar*l/s3 mbar*l/s
He6 mbar*l/s6 mbar*l/s
H210 mbar*l/s10 mbar*l/s
Compression ratio N21×10111×1011
Ar1×10111×1011
He
H22×1072×107
Ultimate Pressure<8x10-8 mbar<5x10-10 mbar
Max. permissable forevacuum pressure for N214 mbar14 mbar
Operating speed72000 min-172000 min-1
Run-up time, approx.2 minutes2 minutes
Max. power consumption240 W240 W
Power consumption at ultimate pressure7 W7 W
Cooling standardConvectionConvection
Cooling optionalAir or waterAir or water
Maximum bake-out temperature of the CF version, water cooled100 °C100 °C
Purge Gas connectionG 1/8″G 1/8″
Venting ConnectionG 1/8″G 1/8″

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Additional Information

WeightN/A
SKU

820051V3300, 820061V3300

Inlet Connection

100 ISO-K, 100 CF

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